| 摘要 |
PROBLEM TO BE SOLVED: To provide a foreign material removing sheet which improves a surface protective separator on a foreign material removal layer having substantially no adhesive force to remove any problem about the adhesion of the removal layer to the separator, so as to display the original function of the separator and hence an expected foreign material removal performance. SOLUTION: The foreign material removing sheet is adhered to a carrier in a substrate processor for removing foreign material depositing to the processor inside. It has at least an adhesive applied layer 1 to be adhered to the carrier, a foreign material removal layer 2 having substantially no adhesive force, and a surface protective separator 3 for the removal layer. The separator 3 has a layer structure of at least two layers, and its layer at the removal layer is a slight adhesive applied layer 32. COPYRIGHT: (C)2006,JPO&NCIPI
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