| 摘要 |
PROBLEM TO BE SOLVED: To provide a centering system and the like, capable of easy and accurate centering, using a laser. SOLUTION: For centering, the rotation reference position of a reflecting mirror 26 is first determined with an auxiliary laser beam. Then, the laser beam from a laser luminescence means 21 is refracted and irradiated, by the reflecting mirror 26 on the inner surface of a second guide metal 15, the laser beam reflected from the second guide metal 15 is received with a laser receiving means 23. The time the laser beam returns to the laser-receiving means 23 is measured by a time measuring means 25a. Then a rotating disk 27 is rotated, and the time is measured likewise at that time (measurement point 2), when the reflecting mirror 26 has turned by 180 degrees. Based on this result, positional deviation (d) in the directions of the measurement point 1 and the measurement point 2 of the second guide metal 15 from the measured difference, between the measurement point 1 and the measurement point 2, is obtained. Measurement is conducted in this manner for a plurality number of times, so that the center position of the second guide metal 15 is specified. Likewise, the center position of the third guide metal 16 is specified. COPYRIGHT: (C)2006,JPO&NCIPI
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