| 摘要 |
PROBLEM TO BE SOLVED: To shorten a measuring time by correcting efficiently a dimension measuring position. SOLUTION: As for correction of the measuring position, measurement is performed after performing position movement in order to correct a position deviation, only when the position deviation of a measuring spot on a measuring object fixed to a measuring device is large. When the position deviation of the measuring spot is small, measurement is performed without correcting the position deviation. A tolerance of the position deviation is determined beforehand corresponding to the difference of a measuring condition such as a measuring magnification or the position of the measuring spot in a measuring image, and the position deviation of the measuring spot on the measuring object such as a glass substrate to be measured is detected. When the position deviation is below the tolerance, measurement is performed as it is, and only when the position deviation is over the tolerance, measurement is performed after correcting the position. COPYRIGHT: (C)2006,JPO&NCIPI
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