发明名称 Computer-readable recording medium storing semiconductor designing program for improving both integration and connection of via-contact and metal
摘要 A semiconductor device has a via-contact, a main wire having an end connected to the via-contact, and an extension extended in line with the main wire from the end of the main wire beyond the via-contact, the width of the extension being equal to or narrower than the width of the main wire. The extension prevents the end of the main wire from being rounded by an optical proximity effect, eliminates a contact defect or an open defect between the via-contact and the end of the main wire, and involves no widening of the main wire around the via-contact, so that other via-contacts may be arranged in the vicinity of the via-contact in question without violating design rules.
申请公布号 US7444614(B2) 申请公布日期 2008.10.28
申请号 US20040968925 申请日期 2004.10.21
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MAENO MUNEAKI;KIMURA KENJI;SEI TOSHIKAZU
分类号 G06F17/50;H01L23/522;G03F1/68;G03F1/70;H01L21/00;H01L21/768;H01L21/82;H01L23/48;H01L23/52;H01L23/528;H01L27/00;H01L29/40 主分类号 G06F17/50
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