发明名称 TFT, method of manufacturing the TFT, flat panel display having the TFT, and method of manufacturing the flat panel display
摘要 A thin film transistor (TFT) including a semiconductor film that may be simply patterned, a method of manufacturing the TFT, a flat panel display (FPD) including the TFT, and a method of manufacturing the FPD. The TFT includes a gate electrode, source and drain electrodes electrically insulated from the gate electrode, and a semiconductor film electrically insulated from the gate electrode and including source and drain regions coupled to the source and drain electrodes, respectively, and a channel region coupling the source and drain regions. The semiconductor film has a groove that isolates the channel region from an adjacent TFT.
申请公布号 US7442960(B2) 申请公布日期 2008.10.28
申请号 US20050131233 申请日期 2005.05.18
申请人 SAMSUNG SDI CO., LTD. 发明人 SUH MIN-CHUL;YANG NAM-CHOUL;KOO JAE-BON;KANG TAE-MIN;KIM HYE-DONG
分类号 H01L21/84;H01L51/05;H01L21/304;H01L21/336;H01L21/762;H01L21/77;H01L27/12;H01L29/786;H01L51/40 主分类号 H01L21/84
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