发明名称 |
Method and apparatus for determining surface characteristics by using SPM techniques with acoustic excitation and real-time digitizing |
摘要 |
By digitizing the UFM signal without using a lock-in amplifier, substantially all of the information initially contained in the UFM output signal may be maintained and may then be used for further data processing. Consequently, any type of model or evaluation algorithm may be used without being restricted to a very narrow bandwidth, as is the case in lock-in based techniques. The digitizing is performed on a real-time basis, wherein a complete UFM curve is digitized and stored for each scan position. In this way, quantitative meaningful values for specific surface-related characteristics with a nanometer resolution may be obtained.
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申请公布号 |
US7441446(B2) |
申请公布日期 |
2008.10.28 |
申请号 |
US20060420325 |
申请日期 |
2006.05.25 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
CHUMAKOV DMYTRO;GEISLER HOLM;ZSCHECH EHRENFRIED |
分类号 |
G01H3/12;G01Q10/00;G01Q60/24;G01Q60/32 |
主分类号 |
G01H3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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