APPARATUS FOR CLEANING AND EXHAUSTING

摘要

An apparatus for cleaning and exhausting chambers is provided to enhance exhaust efficiency by implementing an additional exhaust line in a fluid path connected to a shower head. An apparatus for cleaning and exhausting chambers includes first and second supply units(210,220), and first and second exhaust lines(230,240). The first supply unit is formed at a lower portion of a shower head(201), which is mounted in a chamber lid at an upper portion of a chamber. The second supply unit implemented at the chamber lid or at a side of the chamber as disc shape supplies cleaning gas. The first exhaust line is connected to a lower portion of the chamber. The second exhaust line is connected to a fluid path(203), which is connected to the shower head.