发明名称 SPRAY NOZZLE AND APPARATUS OF SPRAYING GAS HAVING THE SAME
摘要 A spray nozzle and an apparatus of spraying gas having the same are provided to prevent loss of components by exchanging a screw unit when screw threads are damaged. A spray nozzle includes a main body(200) and a screw unit(300). The main body includes a first part(210) having a nozzle for spraying gas to an objector and a second part(220), which is implemented opposite to the nozzle and assembled with the first part. The screw unit, coupled with the second part by inserting into the second part of the main body and made of material having rigidity greater than the main body, includes a screw thread on outer periphery thereof. The main body is made of ceramic and the screw unit is made of teflon.
申请公布号 KR20080094974(A) 申请公布日期 2008.10.28
申请号 KR20070039110 申请日期 2007.04.23
申请人 SEMES CO., LTD. 发明人 JEON, CHI HYUNG
分类号 H01L21/304 主分类号 H01L21/304
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