| 摘要 |
A substrate inspecting apparatus is provided to allow an inspector to see a rear surface of a substrate without turning around the substrate by installing a reflecting mirror between two supporting parts. A substrate inspecting apparatus comprises a base(110), two supporting parts(120), and a reflecting mirror(140). The supporting parts are installed on the base perpendicularly, and define ranges of both observation opening(133) and inspection opening(131). A substrate is mounted on the inspection opening. The reflecting mirror is installed between the supporting parts, and rotative around a rotary shaft(180) so that an image of the substrate placed on the inspection opening is reflected to the observation opening. The substrate is laid on the inspection opening with a front surface up so that the reflection mirror reflects a rear surface of the substrate through the inspection opening.
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