| 摘要 |
<p>Provided are a gas flow transportation device that sufficiently floats a plate-like object by a low-pressure gas flow or a small amount of gas flow and stabilizes the posture of the object, and nozzle plate that is used for the gas flow transportation device. The gas flow transportation device floats a plate-like object by gas ejected from inclined ejection holes and transports the object in a predetermined direction without contact. The nozzle plate used for the device has the inclined ejection holes and a flat section to which the plate-like object is closely positioned. A panel plate forms, along with the flat surface, a transportation surface of the gas flow transportation device, and the upper surface of the panel plate is at the same height as the flat section. The nozzle plate of the transportation surface keeps a first gap from the object in the direction of transportation of the object and a second gap from the object in the direction substantially normal to the transportation direction.</p> |
