| 摘要 |
An arrangement for moving carriers in a vacuum chamber is provided, wherein the carriers in a vacuum coating equipment can be separated from drive rollers for supporting the carriers, and the carriers can also be displaced laterally. In a carrier moving arrangement for moving a carrier(11) in a chamber, in particular a vacuum chamber, the carrier being formed in a plate shape and linearly movable by a drive roller(12), the carrier moving arrangement is characterized in that a lifting mechanism(30,31) moves the drive roller toward and away from a side face of the plate-shaped carrier with a narrow width. The drive roller places on a transfer beam and the lifting mechanism is connected to the transfer beam. The drive roller is coupled with a magnetic coupling. The magnetic coupling includes a first component(19) positioned within the chamber and a second component(20) positioned outside the chamber. The carrier has at least one opening. The carrier includes a through holes(40). The arrangement comprises a hook(14) which extends through the through hole and supports the carrier.
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