LASER MACHINING APPARATUS

摘要

A laser processing apparatus is provided to enable projection of a mask pattern onto an object to be processed with an excellent pattern dimension precision, and to obtain an excellent processing precision. A laser processing apparatus for projecting the pattern of a mask(330) onto an object(320) to be processed by placing the mask supporting a fixed projection lens(310) and the object in a conjugate relation and moving the mask and the object at the same time, comprises a unit for observing alignment marks formed on the surface of the object. An elongation amount(Ex) for the set point in the main scanning direction of the object, and an elongation amount(Ey) for the set point in the subsidiary scanning direction is calculated. The elongation amount(Ex) is amended with the imaging magnification(M) of the projection lens. The elongation amount(Ey) is amended with the moving rate of the mask and/or the object considering the magnification(M).