APPARATUS FOR INSPECTION OF SEMICONDUCTOR DEVICE HAVING THE CLEANING MEANS AND METHOD FOR INSPECTION BY THE SAME

摘要

An inspection apparatus of a semiconductor device having a cleaning member and a semiconductor device inspection method using the same are provided to remove automatically contaminants by using an air cleaner. A vision inspection unit(1) photographs an exterior of a semiconductor device stored in a tray in order to detect a defect by analyzing a photographed image. Defective semiconductor devices are transferred from the corresponding tray to a plurality of reject units. Defectless semiconductor devices are transferred from the corresponding tray to an unloading unit(U). An air cleaner is formed to clean automatically contaminants from an outer surface of a semiconductor device through air before a vision inspection process is performed by the vision inspection unit. The vision inspection unit includes a first vision camera(11) and a second vision camera(12). The air cleaner is installed at a front end of each of the first and second vision cameras.