APPARATUS AND METHOD OF SUPPLYING CHEMICAL SOLUTION

摘要

An apparatus and a method for supplying chemicals are provided to constantly maintain the temperature and concentration of the overall chemicals in a second tank by heating chemicals in a first tank firstly. A chamber(200) is divided into a first tank(300) and a second tank(400) by a partition wall. The first tank is arranged on a side of the partition wall and receives a first chemical from a process chamber to heat the first chemical firstly. The second tank is arranged on the other side of the partition wall in order to heat a mixed chemical of which the first chemical received from the first tank and a second chemical are mixed. The first tank includes a first heating member(320) for heating the first chemical. The second tank includes a second heating member for heating the mixed chemical of the first chemical and the second chemical. The first tank includes a transfer line for receiving the first chemical from the process chamber.