发明名称 |
DEVICE FOR FORMING SEMICONDUCTOR LAYER AND METHOD FOR FORMING SEMICONDUCTOR LAYER |
摘要 |
PROBLEM TO BE SOLVED: To provide a device for forming semiconductor layer and a method for forming a semiconductor layer capable of shortening a processing time of a substrate forming by transferring an ink including a semiconductor material buried in a groove for expressing a pattern of the semiconductor layer and forming the semiconductor layer on the surface of the substrate. SOLUTION: The groove 7 for expressing the pattern of a thin film transistor (TFT) is formed on the surface of a roller 1. A tank 2 supplies the ink 5 including at least the semiconductor material to the roller 1. A squeegee 3 fills the ink 5 supplied to the roller 1 in the groove 7 formed on its surface. The roller 1 transfers the ink 5 filled in the groove 7 to the substrate 4. COPYRIGHT: (C)2008,JPO&INPIT |
申请公布号 |
JP2008159812(A) |
申请公布日期 |
2008.07.10 |
申请号 |
JP20060346737 |
申请日期 |
2006.12.22 |
申请人 |
SHARP CORP |
发明人 |
OKI HIROSHI;NAKAJIMA YOSHIHARU |
分类号 |
H01L21/336;B82B1/00;B82B3/00;H01L29/06;H01L29/786 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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