发明名称 METHOD FOR MANUFACTURING A THREE-DIMENSIONAL SEMICONDUCTOR DEVICE AND A WAFER USED THEREIN
摘要 A method for manufacturing a semiconductor device includes the steps of forming first and second semiconductor wafers each including an array of chips and elongate electrodes, forming a groove on scribe lines separating the chips from one another; coating a surface of one of the semiconductor wafers with adhesive; bonding together the semiconductor wafers while allowing the groove to receive therein excessive adhesive; and heating the wafers to connect the elongate electrodes of both the semiconductor wafers.
申请公布号 US2008164575(A1) 申请公布日期 2008.07.10
申请号 US20070956560 申请日期 2007.12.14
申请人 ELPIDA MEMORY, INC. 发明人 IKEDA HIROAKI;ISHINO MASAKAZU;TENMEI HIROYUKI;KANDA NAOYA;NAKA YASUHIRO;NISHI KUNIHIKO
分类号 H01L21/46;H01L29/06 主分类号 H01L21/46
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