发明名称 APPLICATION OF DIGITAL LIGHT PROCESSOR IN SCANNING SPECTROMETER AND IMAGING ELLIPSOMETER AND THE LIKE SYSTEMS
摘要 <p>Application of digital light processor (DLP) systems in monochromotor, spectrophotometer or the like systems to mediate selection of individual wavelengths, and/or to image elected regions of a sample in an imaging ellipsometer, imaging polar imeter, imaging ref lectometer, imaging spectrophotometer r and/or to provide chopped beams.</p>
申请公布号 WO2008082538(A1) 申请公布日期 2008.07.10
申请号 WO2007US25880 申请日期 2007.12.18
申请人 J.A. WOOLLAM CO., INC 发明人
分类号 G01J3/02 主分类号 G01J3/02
代理机构 代理人
主权项
地址
您可能感兴趣的专利