| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron microscope for inspecting and processing an object having a microstructure, and a manufacturing method of the object having the microstructure. <P>SOLUTION: The manufacturing method includes a process for processing an object by depositing a material by applying an electron beam to a part to be processed at the same time when supplying reaction gas, or cutting off the material, a process for inspecting an object by scanning the surface of the object by an electron beam, introducing generated backscatter electrons and secondary electrons into an energy selector 7, making the secondary electrons reflected by the energy selector 7, detecting the backscatter electrons passing through the energy selector 7, and forming an electron microscope image in a scanning region according to the detected backscatter electrons, and a process deciding whether the material should be further deposited or cut off by checking the formed electron microscope image. The electron microscope and the processing system constituted for executing this method are provided. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
