| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator device and the manufacturing method as well as the driving method of the actuator, capable of improving durability by preventing the deterioration of displacement, and provide a liquid injection head. <P>SOLUTION: The actuator device is equipped with a piezoelectric body layer 70, provided on a substrate so as to be capable of being displaced and consisting of a piezoelectric material constituted of oxide having a polarizing structure, and a piezoelectric element 300 equipped with a pair of electrodes 60, 80 pinching the piezoelectric body layer 70. An oxygen deficient layer 71 with oxygen deficiency more than the other region 72 is provided in a region neighbored to one of the electrodes 80 of the piezoelectric layer 70. <P>COPYRIGHT: (C)2008,JPO&INPIT |
