摘要 |
PROBLEM TO BE SOLVED: To provide an image sensor and its manufacturing method. SOLUTION: This method for manufacturing the image sensor includes a step for forming a pixel array containing a photo diode structure and an insulating film structure in an active region of a semiconductor substrate, a step for forming a metal pad on the pixel array, a step for forming an insulating film on the metal pad, a step for forming a protective film on the insulating film, and a step for etching the protective film to form a pad-open part and a pixel open part. COPYRIGHT: (C)2008,JPO&INPIT
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