发明名称 IMAGE SENSOR, AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an image sensor and its manufacturing method. SOLUTION: This method for manufacturing the image sensor includes a step for forming a pixel array containing a photo diode structure and an insulating film structure in an active region of a semiconductor substrate, a step for forming a metal pad on the pixel array, a step for forming an insulating film on the metal pad, a step for forming a protective film on the insulating film, and a step for etching the protective film to form a pad-open part and a pixel open part. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008160104(A) 申请公布日期 2008.07.10
申请号 JP20070317487 申请日期 2007.12.07
申请人 DONGBU HITEK CO LTD 发明人 IM KI SIK;HYUN WOO SEOK
分类号 H01L27/146;H01L27/14 主分类号 H01L27/146
代理机构 代理人
主权项
地址