| 摘要 |
PROBLEM TO BE SOLVED: To smoothly change over conduction and insulation among a plurality of contacts. SOLUTION: When electric current is not flowed to an actuator 2, a conductive fluid 5 exists on contacts 3, 3 formed on a glass substrate 7 of a base body 1, but does not exists on the contacts 4, 4, the contacts 3, 4 are insulated; whereas, when electric current flows on the actuator 2, a diaphragm 11 is elastically deformed to the lower side by this actuator 2, volume of a cavity 10 formed in a silicon substrate is reduced, and the top end of a conductive fluid 5 moves in the fluid passage 13. As a result, the conductive fluid 5 exists not only on the contacts 3, 3 but also on the contacts 4, 4, thus, both contacts 3, 4 are conducted through the conductive fluid 5. Thereafter, when electric current is stopped flows to the actuator 2, since the deformation of the diaphragm 11 and volume of the cavity 10 return to the original state, the top end of the conductive fluid 5 is moved to a liquid pool 12 side in the fluid passage 13. As a result, the contacts 3, 4 are insulated. COPYRIGHT: (C)2008,JPO&INPIT
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