发明名称
摘要 In order to provide a thermostable and highly effective barrier coating on a substrate, and to protect the substrate against the effect of harmful gas components even at high temperatures, the invention provides a coated substrate comprising a barrier coating having a multiplicity of consecutive individual layers respectively of a kind differing from or similar to a neighboring individual layer, the individual layers exhibiting a layer thickness of respectively at most 50 nanometers.
申请公布号 JP2008524786(A) 申请公布日期 2008.07.10
申请号 JP20070545974 申请日期 2005.12.19
申请人 发明人
分类号 H01J61/35;H01L21/768;H01L23/522 主分类号 H01J61/35
代理机构 代理人
主权项
地址