| 发明名称 |
Al ALLOY FILM FOR DISPLAY DEVICE, DISPLAY DEVICE, AND SPUTTERING TARGET |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an Al alloy film that has high adhesion to a conductive oxide film and low contact resistivity even when the Al alloy film is directly connected with the conductive oxide film without using a barrier metal, being preferably superior in dry etching characteristics. <P>SOLUTION: An Al alloy film for a display device is directly connected with a conductive oxide film on a substrate. The Al alloy film contains 0.05 to 0.5 atom% of Ge and 0.05 to 0.45 atom% of Gd and/or La in total. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
| 申请公布号 |
JP2008160058(A) |
申请公布日期 |
2008.07.10 |
| 申请号 |
JP20070168298 |
申请日期 |
2007.06.26 |
| 申请人 |
KOBE STEEL LTD |
发明人 |
GOTO YASUSHI;FUKU KATSUFUMI;HINO AYA;OKUNO HIROYUKI;NAKAI JUNICHI;KAWAKAMI NOBUYUKI;OCHI MOTOTAKA |
| 分类号 |
H01L21/28;G02F1/1343;G02F1/1368;G09F9/30;H01L21/285;H01L29/417;H01L29/423;H01L29/49;H01L29/786 |
主分类号 |
H01L21/28 |
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