| 摘要 |
PROBLEM TO BE SOLVED: To provide a device with which focusing of a mirror surface and glass surface difficult to be focused with a microscope of a configuration of coaxial illumination is exactly performed. SOLUTION: The slit light 10 for exactly performing focusing to the microscope of the configuration consisting of only the coaxial illumination of the conventional type in Fig. 7 is composited and thereby the video obtained by striking the light composited with the coaxial illumination and the slit light to an object is projected by a CCD camera. As shown in video Fig. 10 having the slit light 10, the reproducibility of the focusing and the improvement in accuracy are obtained. COPYRIGHT: (C)2008,JPO&INPIT |
