| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum apparatus capable of keeping the inside of a vacuum envelope in a high-vacuum state. SOLUTION: The vacuum apparatus includes a hermetically-sealed vacuum envelope 2 and an exhaust pipe 60 communicated with the inside of the vacuum envelope to evacuate the vacuum envelope of air. The exhaust pipe includes a smaller inner-diameter portion 60a and a greater inner-diameter portion 60b which is disposed far away from the vacuum envelope relative to the smaller inner diameter portion and has a greater inner diameter than that of the smaller inner portion. The exhaust pipe is sealed with a metallic material 62 at a position where the smaller and greater inner-diameter portions adjoin each other. COPYRIGHT: (C)2008,JPO&INPIT
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