| 摘要 |
PROBLEM TO BE SOLVED: To measure accurately the position of a ridgeline (edge), when a measuring object has a surface of a light reflecting material (for example, a metal material). SOLUTION: A ridgeline measuring method has a light absorbing coating formation process for forming a coating of a light absorbing material on the surface on one side wherein a ridgeline of the measuring object is used as a boundary, a ridgeline position measuring process for measuring optically the ridgeline position which is the position of the ridgeline of the measuring object on which the coating of the light absorbing material is formed, and an opening interval operation process for operating an interval between two ridgelines from two ridgeline positions. A diehead as the measuring object to which the ridgeline measuring method is applied is also provided. COPYRIGHT: (C)2008,JPO&INPIT
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