ADVANCED MIXING SYSTEM FOR INTEGRATED TOOL HAVING SITE-ISOLATED REACTORS
摘要
<p>An integrated processing tool is described comprising a full-wafer processing module and a combinatorial processing module. Chemicals for use in the combinatorial processing module are fed from a delivery system including a set of first manifolds. An output of each first manifold is coupled to at least one mixing vessel. An output of each mixing vessel feeds more than one of a set of second manifolds. An output of each set of second manifolds feeds one of multiple site- isolated reactors of the combinatorial processing module.</p>
申请公布号
WO2008083178(A1)
申请公布日期
2008.07.10
申请号
WO2007US88859
申请日期
2007.12.26
申请人
INTERMOLECULAR, INC.;WEINER, KURT, H.;CHIANG, TONY, P.;FRANCIS, AARON;SCHMIDT, JOHN
发明人
WEINER, KURT, H.;CHIANG, TONY, P.;FRANCIS, AARON;SCHMIDT, JOHN