| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a semiconductor device with the detection accuracy enhanced of a flow rate. <P>SOLUTION: This semiconductor device comprises at least a heat generator formed on a semiconductor substrate and a flow-rate detection part structured thereon to detect the flow rate of a fluid. On the same surface side of the semiconductor substrate, the flow-rate detection part and a humidity detection part detecting the humidity of the fluid are formed side by side along the flowing direction of the fluid such that the humidity detection part is positioned on the upstream side relative to the flow-rate detection part. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
