| 摘要 |
PROBLEM TO BE SOLVED: To form a resin layer 42 so as not to develop an ununiform thickness therein. SOLUTION: A mask 1 includes a plate 10 which has a plurality of through holes 20 for charging resin 40 therethrough. The opening shape of each of a plurality of the through holes 20 is respectively a circle or a regular polygon. A plurality of the through holes 20 includes through holes 22, which belong to a first group, and through holes 22, which belong to a second group and surround the periphery of the through holes 24 belonging to the first group. The opening area of each of the through holes 22 belonging to the first group is respectively larger than that of each of the through holes 24 belonging to the second group. COPYRIGHT: (C)2008,JPO&INPIT
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