THIN FILM STRUCTURE BODY, MICRO-ACTUATOR, OPTICAL SHUTTER DEVICE, LIGHT FLUX ADJUSTING DEVICE, AND MICRO-SWITCH

摘要

PROBLEM TO BE SOLVED: To provide a thin film structure body which hardly causes a twisting phenomenon in a curved beam portion composed of thin films. SOLUTION: The thin film structure body has a beam portion which is composed of thin films and is curved by an internal stress in the state that an external force is not applied thereon. The beam portion is divided into a plurality of beam composing portions by means of one or more slits elongating in the longitudinal direction of the beam portion. COPYRIGHT: (C)2008,JPO&INPIT