INSPECTING METHOD, INSPECTING APPARATUS AND COMPUTER READABLE STORAGE MEDIUM HAVING PROGRAM STORED THEREIN

摘要

A probe card of an inspecting apparatus is provided with a flitting circuit wherein a voltage is applied between a pair of probes brought into contact with an electrode of a substrate so as to generate flitting phenomenon and electricity is carried between the probes and the substrate; and a switching circuit, which electrically connects the pair of probes and the flitting circuit and freely switches polarities of voltages to be applied to the pair of probes. The polarity of the voltage to be applied to the probes is changed every time flitting is performed to the electrode of the substrate, and a trouble of nonuniform quantity of the adhered material on the probes can be eliminated.