PRESSURE WAVE GENERATOR AND TEMPERATURE CONTROLLING METHOD THEREOF

摘要

Disclosed is a pressure wave generator (1) comprising a thermally conductive substrate (2), a heat insulating layer (3) formed on one major surface of the substrate (2), an insulating layer (5) formed on the heat insulating layer (3), and a heat generating body (4) formed on the insulating layer (5) and generating heat when a current containing an alternating component is applied thereto. The heat insulating layer (3) is composed of a nanocrystalline silicon. The insulating layer (5) is formed to contain one of silicon nitride (Si<SUB>3</SUB>N<SUB>4</SUB>), silicon dioxide (SiO<SUB>2</SUB>), aluminum oxide (Al<SUB>2</SUB>O<SUB>3</SUB>), magnesium oxide (MgO), diamond crystalline carbon (C), aluminum nitride (AlN) and silicon carbide (SiC). The heat generating body (4) is formed to contain, for example, gold (Au) or tungsten (W).