| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a gas sensor that is suppressed in its base resistance value to be small and is capable of obtaining superior responsiveness. SOLUTION: The manufacturing method of the gas sensor, having a responsive part constituted of a responsive material changed in its resistance value corresponding to a change in the concentration change of a specific gas component in a measuring target gas, has: a primary mixture forming process for obtaining a primary mixture by mixing an Sn source, which contains at least one of an Sn ion hydrolyzed precipitate, and an alkaline earth metal source containing alkaline earth metal ions in a liquid medium; a secondary mixture forming process for obtaining a secondary mixture containing Sn and an alkaline earth metal by removing the liquid medium from the first mixture; a baking process for baking the secondary mixture to obtain the responsive material; and a responsive part forming process for forming the responsive part that uses the responsive material. COPYRIGHT: (C)2008,JPO&INPIT
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