| 摘要 |
PROBLEM TO BE SOLVED: To restrain a current from leaking to a sample and a probe to measure highly sensitively electric characteristics, when heating the sample by a heater. SOLUTION: A sample heating part for heating the sample 2 is constituted of the heater 23, a metal shield 22 for covering the heater under an electrically insulated condition to be grounded, and an insulating sheet 21 provided in a sample mounting side of the metal shield. A probe heating part is constituted similarly of a heater 23, a metal shield 27 for covering the heater under an electrically insulated condition to be grounded, and an insulating sheet 26. COPYRIGHT: (C)2008,JPO&INPIT
|
