| 摘要 |
PROBLEM TO BE SOLVED: To provide a specimen mount enabling reduction of complicated stage operating processes applied from the time of cleaning operation by etching a cross-section until the time of operation for observing and measuring the cross-section when measuring a specimen having a processed cross-section by an AES, and a process like fine angle adjustment at the time when observing a plurality of specimens in the AES carrying a CMA. SOLUTION: An inclined part 2 comprising two inclined faces having tilt angles of 50°-60°is provided in the specimen mount 1. Thereby, after etching is applied, the operation for observation and measurement becomes possible without reversing the specimen mount. In addition, due to a structure capable of fixing the specimen 5 in parallel with the inclined part 2, operation required for positional adjustment can be cut down by making it possible to uniform the directions of the cross-sections for observation. COPYRIGHT: (C)2008,JPO&INPIT
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