DEVICE PACKAGE AND METHOD OF MAKING A DEVICE PACKAGE
摘要
<p>The application is directed to a reservoir (40) for use with a micro-electromechanical device having a first surface area to be lubricated. The reservoir comprises a solid component with a porous structure having a second surface area. The second surface area is greater than the first surface area. The reservoir also comprises a lubricant capable of reversibly reacting with either the solid component or the first surface area of the micro-electromechanical device.</p>
申请公布号
WO2008083029(A2)
申请公布日期
2008.07.10
申请号
WO2007US88340
申请日期
2007.12.20
申请人
TEXAS INSTRUMENTS INCORPORATED;JACOBS, SIMON, JOSHUA;MILLER, SETH, A.