LIQUID PASSING STRUCTURE AND CHEMICAL LIQUID SUPPLY DEVICE WITH THE LIQUID PASSING STRUCTURE

摘要

[PROBLEMS] Provided are a liquid passing structure capable of allowing liquid to reliably reach a liquid leading path in which the liquid is moved by a capillary effect and a chemical liquid supply device capable of allowing chemical liquid from a chemical liquid container to reliably reach a guidance member through a liquid leading path. [MEANS FOR SOLVING PROBLEMS] The liquid passing structure has the liquid leading path (421a) and a small-hole section (412) formed above the entrance of the liquid leading path and having a cross-section slightly greater than that of the liquid leading path so as to lead liquid from a supply source to theliquid leading path. The lower surface, connected to the liquid leading path, of the small-hole section has a slope surface (422). The chemical liquid supply device has the liquid passing structure in a liquid supply path for supplying chemical liquid from a chemical liquid container (1) to the guidance member (5) for guiding the chemical liquid to a position in contact with liquid flowing intermittently.