Verfahren zur Bestimmung eines Translationsfehlers eines Waferscanners bei der photolithographischen Strukturierung eines Halbleiterwafers,申请号DE20031050708-传众专利搜索

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发明名称	Verfahren zur Bestimmung eines Translationsfehlers eines Waferscanners bei der photolithographischen Strukturierung eines Halbleiterwafers
摘要
申请公布号	DE10350708(B4)	申请公布日期	2008.07.10
申请号	DE20031050708	申请日期	2003.10.30
申请人	QIMONDA AG	发明人	GRUSS, STEFAN;VORWERK, MANUEL;FROEHLICH, HANS-GEORG;EHRBRECHT, RAPHAEL
分类号	G03F9/00;G03F7/20	主分类号	G03F9/00
代理机构		代理人
主权项
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