| 摘要 |
A chiller system for semiconductor manufacturing equipment is disclosed, which includes an evaporator for evaporating a low-temperature low-pressure liquid coolant flowing thereto and discharging a high-temperature low-pressure gaseous coolant, a condenser for changing a high-temperature high-pressure gaseous coolant flowing therethrough to a low-temperature high-pressure liquid coolant, a compressor for compressing a low-pressure gaseous coolant into a high-pressure gaseous coolant, a thermocline, connected to one side of the evaporator, for storing therein the heat-exchanged energy when a process temperature is changed, a coolant supply line connected to the thermocline and having a pump and a heater installed thereon, and a coolant recovery line connected to the thermocline. |
