| 摘要 |
A miniature electrical conductance sensor using dual concentric ring-disk electrodes with a flat face is provided to improve accuracy in measurement by applying a measurement circuit appropriate to the miniature electrical conductance sensor. A miniature electrical conductance sensor includes a disk-shaped receiving electrode(10), a ring-shaped excitation electrode(50), and an insulating film which are formed on a flat face in a concentric ring structure. The disk-shaped receiving electrode is formed by a cross-section of a metal line on a flat face obtained by planarizing one ends of the metal line, an insulating capillary(30), and a fine metal tube. The ring-shaped excitation electrode is formed by a cross section of the fine metal tube. The insulating film is formed of a cross section of the insulating capillary. The miniature electrical conductance sensor further includes an excitation voltage applying line(53) and an excitation detecting line(55) connected to the excitation electrode. |
