发明名称 PATTERN FORMING METHOD
摘要 <P>PROBLEM TO BE SOLVED: To provide a conductive pattern forming method of formation of a stable conductive pattern. <P>SOLUTION: The conductive pattern forming method includes steps of: (a) preparing a photosensitive-pattern forming composition which contains metal fine particles, a dispersing agent for maintaining these metal fine particles inside a dispersing medium in a dispersing state, an acid optically generating agent, and a dispersing medium; (b) applying onto a base material the photosensitive-pattern forming composition and drying the composition so as to form a film made of the composition on the base material; (c) irradiating radioactive rays on the film obtained in the step (b) as to obtain its latent image; (d) heat-treating the film including the latent image obtained in the step (c); and (e) processing with a developer the heat-treated film obtained in the step (d) so as to obtain a conductive pattern. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008159754(A) 申请公布日期 2008.07.10
申请号 JP20060345608 申请日期 2006.12.22
申请人 AZ ELECTRONIC MATERIALS KK 发明人 NAGAHARA TATSURO;SEKITO TAKASHI
分类号 H01L21/288;G03F7/004;G03F7/38;G03F7/40;H01B13/00;H01L21/3205 主分类号 H01L21/288
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