| 摘要 |
PROBLEM TO BE SOLVED: To provide a device for inspecting a scanning optical system capable of performing total performance at a time. SOLUTION: The device performs: imaging a laser beam L on a face to be scanned 13 with CCD sensors 51a-51c; controlling the operation of a laser light source 22 with an APC circuit 28 so as each of 6-deflection reflection face 33 is irradiated with the laser beam L; analyzing data of images obtained by each CCD sensor; and calculating the irradiation position of the laser beam L on the face to be scanned 13 with an irradiation position calculation circuit 70. A parameter calculation circuit 71 calculates each parameter of a face fall amount of the deflection reflection face 33 and a jitter component, and a shift amount of an angle making the face to be scanned 13 and an optical axis of the laser beam L from calculation results of the irradiation position before and after moving the CCD sensor 51b on a moving stage 53 in a direction of the optical axis of the laser beam L. A determination circuit 72 determines the results by comparing each calculated parameter with a regulation value and displays the determination results on a monitor 54. COPYRIGHT: (C)2008,JPO&INPIT
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