| 摘要 |
PROBLEM TO BE SOLVED: To prevent giving damages to a magnetic field detector or a surface of a sputter target to be measured during PTF measurement. SOLUTION: A magnetic field detector holding mechanism 400 is capable of application to a manual-type or automatic-type PTF measuring device. The mechanism has a long groove, capable of arrangement in the magnetic field detector 410 and an insertion part 420 holding in the magnetic field detector holding mechanism body. At least one fastener 430 threads through at least one opening formed in the magnetic field detector holding mechanism body, where the fastener 430 is adapted to be adjusted to mechanically couple with the insertion part 420 so as to hold the insertion part 420 at a predetermined location within the magnetic field detector holding mechanism body. As a result, the insertion part 420 prevents the magnetic field detector 410 from being damaged by over-tightening of the fastener 430, and also prevents scratching of the surface of the sputter target to be measured. COPYRIGHT: (C)2008,JPO&INPIT
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