| 摘要 |
PROBLEM TO BE SOLVED: To form a microscopic structure with an aspect ratio of at least 1 in high throughput. SOLUTION: With the use of a microscopic structure transfer apparatus for transferring a microscopic structure which is composed of a pair of cylindrical pressing and heating rolls, a pattern is transferred under the conditions that the pressure of the contact part between a mold and the surface of a substrate is at least 1 MPa pressure, and the width W of a pressurization part parallel with the advance direction of the substrate meets a formula 1: W≥128×η×a/P, whereinηis the viscosity of the surface of the substrate (Pa s); a is the circumferential speed of the rolls (mm/s); and P is the pressure of the pressurization part (Pa). COPYRIGHT: (C)2008,JPO&INPIT
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