| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid substance dripping apparatus capable of maintaining a predetermined dripping pitch p even at a high relative moving velocity V of a liquid substance supply means relative to a substrate. SOLUTION: The liquid substance dripping apparatus 10 that drips liquid droplets ejected from a liquid substance supply means 20 onto a substrate 1 at a predetermined pitch p by relatively moving the liquid substance supply means 20 relative to the substrate 1 in the direction for a liquid droplet to be dripped is equipped with a plurality of liquid substance supply means 20A, 20B disposed in the direction for a liquid droplet to be dripped and a control means for controlling the timing of ejecting a liquid droplet from each of the liquid substance supply means 20A, 20B in such a manner that the following liquid substance supply means 20B drips a liquid droplet B1 between liquid droplets A1 and A2 dripped by the preceding liquid substance supply means 20A. COPYRIGHT: (C)2008,JPO&INPIT
|
