| 摘要 |
<p>Provided is a multilayer multichannel optical converting element for converting a plurality of optical paths by using a mirror. A method for manufacturing such element includes (1) a step of forming a vertical waveguide by filling a plurality of holes formed on a substrate with a core material, (2) a step of forming a core by filling a groove intersecting with the hole on the substrate with a core material, and then forming a clad layer on the core to form a horizontal waveguide, (3) a step of forming a groove having an inclined surface at the intersecting section of the vertical waveguide and the horizontal waveguide, and forming a mirror by forming a metal film or a dielectric film on the inclined surface, (4) a step of forming an electrode on a glass substrate on the opposite side to the mirror, and (5) a step of dicing the substrate into chips.</p> |
