| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a high-reliability substrate retainer which reduces breakage caused by bolting, and a manufacturing method for such a substrate retainer. <P>SOLUTION: The substrate retainer includes a ceramic base 12 which is provided at an outer edge area 20 on a mounting region 14 for a substrate being processed and has many through-holes 28, many cylindrical metal sockets 22 which are inserted into each of the through-holes 28 and have bolt holes 24, a first brazing filler material which is provided between each of the cylindrical metal sockets 22 and the through-holes 28 for bonding the cylindrical metal sockets 22 and the ceramic base 12, a metal ring 26 which is fitted to an outer circumferential sidewall of the ceramic base 12 and has the thermal expansion coefficient greater than that of the ceramic base 12, and a second brazing filler material which is provided between the metal ring 26 and the outer circumferential sidewall of the ceramic base 12 for bonding the metal ring 26 and the ceramic base 12. At the top surface side of the outer edge area 20, the end of each of the cylindrical metal sockets 22 is higher than the top surface of the outer edge area 20. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
