| 摘要 |
PROBLEM TO BE SOLVED: To secure a sufficient joint strength and a good joined state by making a metal joint film of an outer frame thick in manufacturing a piezoelectric vibrator which is such that substrates are joined by diffusion joining on the front and rear of an intermediate piezoelectric plate made by integrating a piezoelectric vibrating reed and the outer frame into one unit to seal the piezoelectric vibrating reed inside. SOLUTION: Excitation electrodes 7 and 8 and conductive metal thin films 9, 10, and 13 are patterned on a quartz plate 23 having the outer shape of an intermediate quartz plate 2. With the excitation electrodes covered with resist films 24 and 25, electrolytic plating is performed to stack plating films 26-28 on the conductive metal thin films formed on the top and rear faces of the outer frame 6 as a base film, forming the metal joint films 29-31 having a thickness suitable for diffusion joining. After surface-activating the metal joint films by irradiation of plasmas, etc., a lower-side substrate 4 and an upper-side substrate 3 are airtightly joined to the intermediate quartz plate by diffusion joining between each metal joint film of the outer frame and the metal thin film of each substrate. COPYRIGHT: (C)2008,JPO&INPIT
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