| 摘要 |
PROBLEM TO BE SOLVED: To stably acquire a prove image without being affected by service conditions or noises in a scanning electron microscope equipped with an aberration correction device. SOLUTION: An image photographed in a just focus state and an image photographed in a defocused state are inputted to a computer as image data (step 1). A size of a correlation window image is automatically determined based on an input data size and an output data size to prepare a correlation window (steps 2 and 3). A mutual correlation calculation of the correlation window and a reference region is performed (step 6), followed by repeating of this calculation while shifting the reference region (steps 7-10), thereby providing a mutual correlation matrix (step 11) to acquire a probe image. COPYRIGHT: (C)2008,JPO&INPIT
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