| 摘要 |
PROBLEM TO BE SOLVED: To provide an operator-free and fully-automated pattern matching method, and to provide an apparatus having high throughput. SOLUTION: The pattern matching method and apparatus for matching patterns between design data and an image acquired by a scanning electronic microscope, perform matching in each direction between an edge of the design data and that of an image acquired by the scanning electronic microscope. COPYRIGHT: (C)2008,JPO&INPIT
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